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Equipment Details

Name of the Equipment
Zeta 3D Microscope
Group
Crystalline Silicon Solar Cells
Category
litho/analytical
Operator
System Owner
Guru Burkul
guruburkul@iitb.ac.in

Make / ModelZeta Instruments/Zeta 20
InformationNo
Serial Number186-VSNOV2011
FootPrintLxDXH = 300mmx467mmx615mm
InstallationDate06/18/2012
Equipment TypeMaterial and structural characterization tools
LocationNCPRE Char lab (3rd Floor, NanoE Building)
AMC Required
Local DealerGangadhara

M.R.C-A.P.E.Research AFM Lab VERGENTA SYSTEMS INDIA Lab Number #120 Material Research Center Indian institute of Science Bangalore-560012 Karnataka, India Phone:+91- 9739916571 Phone/Fax:+91- 80-40971676
Actual DealerZeta Instruments

Vamsi Velidandla ZETA Instruments Tel 408.573.7638 | Fax 408.573.7627 | Sales 408.573.7285 | Mobile 510-862-6270 2528 Qume Drive, Suite 12 San Jose, CA 95131 www.zeta-inst.com
SOP SOP/73_SOP.pdf
Training & other policy documentsPOLICY/73_POLICY.pdf
Recipies
Glimpse
Tool Facilities RequirementsNA
AccessOpen
Lab Phone No3585
Substrate allowedAny substrate with thickness below around 5cms.
Substrate DimensionFrom a few mm to 6 inches diameter
Chemical allowedNA, Any
Precursors/ Targets available
*Based on stock availability
NA
Precursor/ Target loaded inside tool4
Target dimensionNA
Gases allowedNA
Contamination remarksNA